TY  - BOOK
AU  - Gardner J W
AU  - Varadan V KAwedelkarim O O
TI  - Microsensors MEMS and Smart Devices
T2  - -
SN  - 0-471-86109-x
PY  - 2007///
PB  - John  Wiley and Sons
KW  - "Microsensors, "Microsensors
N1  - -
ER  -