TY  - BOOK
AU  - Gonzalez Ruiz
TI  - Poly-SiGe for MEMS-above-CMOS Sensors
SN  - 978-94-007-6799-7
PY  - 2014///
PB  - Springer Netherlands
N1  - Fulltext
UR  - http://link.springer.com/10.1007/978-94-007-6799-7
ER  -