Liu  Chang <br/><br/>
Foundations of MEMS 

 - 2 
 - 576 
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<br/><br/> - 
<br/><br/><br/>English 
<br/><br/><label>ISBN: </label>978-81-317-6475-6 
<br/><br/><label>Subjects--Topical Terms: </label><br/>--