000 00483nam a2200193Ia 4500
008 200825s9999||||xx |||||||||||||| ||und||
020 _a0-471-86109-x
100 _aGardner J W
_912610
245 0 _aMicrosensors MEMS and Smart Devices
250 _a-
264 _bJohn Wiley and Sons
_c2007
300 _a503
490 _a-
500 _a-
546 _aENG
650 _a"Microsensors, "Microsensors
_922531
700 _aVaradan V KAwedelkarim O O
_922532
942 _cBK
999 _c12500
_d12500