000 00470nam a2200157Ia 4500
008 201210s9999||||xx |||||||||||||| ||und||
020 _a978-1-4471-5541-6
100 _aSugioka
_947376
245 0 _aFemtosecond Laser 3D Micromachining for Microfluidic and Optofluidic Applications
250 _a1
264 _bSpringer London
_c2014
_dMonograph
500 _aFulltext
546 _aENG
856 _uhttp://link.springer.com/10.1007/978-1-4471-5541-6
942 _cEBK
999 _c29196
_d29196