000 00443nam a2200157Ia 4500
008 201210s9999||||xx |||||||||||||| ||und||
020 _a978-3-319-00780-9
245 0 _a"MEMS and Nanotechnology, Volume 5"
250 _a1
264 _bSpringer International Publishing
_c2014
_dMonograph
500 _aFulltext
546 _aENG
700 _aShaw III
_947540
856 _uhttp://link.springer.com/10.1007/978-3-319-00780-9
942 _cEBK
999 _c29393
_d29393