000 00441nam a2200157Ia 4500
008 201210s9999||||xx |||||||||||||| ||und||
020 _a978-94-007-6799-7
100 _aGonzalez Ruiz
_947693
245 0 _aPoly-SiGe for MEMS-above-CMOS Sensors
_p44
250 _a1
264 _bSpringer Netherlands
_c2014
_dMonograph
500 _aFulltext
546 _aENG
856 _uhttp://link.springer.com/10.1007/978-94-007-6799-7
942 _cEBK
999 _c29574
_d29574