000 00399nam a2200181Ia 4500
008 200822s9999||||xx |||||||||||||| ||und||
020 _a978-81-317-6475-6
100 _aLiu Chang
_912540
245 0 _aFoundations of MEMS
250 _a2
264 _bPearson Education Pvt. Ltd.
_c2012
300 _a576
490 _a-
500 _a-
546 _aENG
650 _a--
_912541
942 _cBK
999 _c6474
_d6474